# Al₂O₃-on-Si thin-film benchmark handoff **Validated public benchmark; bounded hybrid across 5–10 nm** **Audience:** Mixed technical **Depth:** Explanation-first **Terminology:** Standard field terminology **Derived from:** CGRP packet `INV-2026-03-27-HT-T1`, `P16` **Boundary + horizon:** Planar cross-plane solid multilayer thermoreflectance benchmark: **Al transducer | ALD Al₂O₃ | native-oxide-present (001) Si**. Active horizon is the benchmark-only comparison window for the **4.67 nm** and **9.39 nm** Al₂O₃ public cases. **[STATE: Equilibrium Band]** ## Current bounded result - **4.67 nm case:** interface-leaning - **9.39 nm case:** near parity - **Overall 5–10 nm read:** bounded hybrid - **Not established here:** raw TDTR replay or per-interface TBR split ## Problem This handoff packages the **public-benchmark path** for a bounded non-equilibrium heat-transfer question: within the present thin-film benchmark boundary, which route best explains the observed departure from classical continuum expectations? The surviving benchmark-level comparison is among interfacial thermal resistance, microscale transport nonlocality, and a bounded hybrid, with the final packet supporting a bounded-hybrid ranking across the 5–10 nm range. ## Boundary and evidence basis Inside the final boundary are finite Al₂O₃ film resistance, the **combined** interface contribution across the ultrathin stack, the thickness change from **4.67 nm** to **9.39 nm**, and the validated benchmark comparison artifacts. Outside the boundary are internal flow, intended phase change, raw TDTR delay-time replay, justified per-interface decomposition, and any user-local specimen claim. The packet uses direct-source fields plus transparent derivations, with unknowns held as **NA**. Core retained values: - **4.67 nm** and **9.39 nm** XRR thicknesses - **1.50 ± 0.09 W/m/K** intrinsic Al₂O₃ conductivity - **6.92 ± 0.50 m²·K/GW** combined TBR ## Current bounded result The validated comparison sheet supports a **bounded hybrid** across the 5–10 nm Al₂O₃ benchmark range overall. The thinner point is **interface-leaning**, while the thicker point shifts toward film/interface parity. This is sufficient for benchmark-level route ranking, but not for claims of raw-trace replay or separate interface resistances. ## What would reopen or invalidate it Use the validated benchmark comparison sheet as the current decision surface. Escalate beyond this handoff only if the next inference requires raw TDTR delay-time traces, modulation-frequency replay, justified per-interface decomposition, or transfer to a different specimen. **Constraints used:** standards-first; no new physics; no invented anchor; same Tank continuity; direct-source-only fill; combined TBR stays combined; unknowns remain NA; one-variable reassessment on thickness; benchmark-only scope explicit; workbook/CSV agreement required. **Limits / uncertainties:** benchmark-only export; no raw TDTR delay-time traces recovered; no justified per-interface TBR decomposition; native-oxide thickness unresolved; no local-run dynamic certification. **Kill-test / next test:** Use the validated benchmark comparison sheet as the current decision surface. The present route ranking fails if the next required inference depends on raw TDTR delay-time traces, modulation-frequency replay, or justified per-interface decomposition that the public packet does not supply. **Derived from CGRP packet; no new investigatory claims added.**